針對電容式微加速度計中的氣膜阻尼問題，基于稀薄氣體動力學(xué)理論和滑流修正的壓膜雷諾方程，分析了敏感質(zhì)量塊在軸向運動中受到的氣膜阻尼效應(yīng)，得到了阻尼力和阻尼系數(shù)的簡化解析解。研究結(jié)果表明，敏感質(zhì)量塊受到的氣膜阻尼力不但與尺寸和速度有關(guān)，還與固體壁面的材質(zhì)、表面粗糙度和光潔度等特性有關(guān)。通過實例分析給出了三種減小氣膜阻尼的方法，指出動量協(xié)調(diào)系數(shù)是影響氣膜阻尼(尤其是壓膜阻尼)的關(guān)鍵因素之一。

Based on the rarefied gas dynamics theory and the squeeze film Reynolds equation amended with slip flow boundary condition, the gas film damping effect on the sensitive proof mass, moving along its axial direction, is analyzed for capacitive micro accelerometers. Simplified analysis solutions are obtained for damping force and damping coefficient. It shows that gas film damping force has relations not only with the accelerometer dimensions and velocity of the sensitive proof mass, but also with the factors, such as solid wall material, surface roughness, smooth finish, and so on. Three methods have been proposed to decrease the gas film damping of capacitive micro accelerometers through sample analysis. Finally, it is pointed out that accomodation coefficient is an key factor for gas film damping, especially for squeezed film damping.